Spectroscopic Ellipsometer

Ellipsometer (2).jpg

Variable angle of incidence: 44⁰ – 90⁰ (min. Step size – 0.1⁰)
Wavelength range: 370nm -1000nm
Sample size: No limit on max. size and minimum size is defined by the spot size (3mm) and no of readings that the user require
Minimum thickness: 1nm.
Maximum thickness : depends on the refractive inde of the film. The film should be preferably transparent.
Accuracy: 0.01 nm.

Sample Preparation:
Sample should be a continuous thin film (closely assembled particles cannot be done) on a substrate (eg. Si wafer). Though transparent substrates can also be used, it is preferable to use opaque substrate.

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